Mounts wafers/substrates on
dicing frames up to 12", simple-to-use, adjustable temperature, roller mechanism,
UV tape capable.
MWM-853.pdf
FEATURES
Chucks
- Available for All Standard 8” & 12"
Wafer/Film Frame Sizes. Custom chucks and
Non-Contact chucks provided to meet all
application requirements.
Wafer/Film Frame Sizes. Custom chucks and
Non-Contact chucks provided to meet all
application requirements.
Desktop
Design - minimizes space requirements.
Built-in Vacuum Generator.- no vacuum line required.
Built-in Vacuum Generator.- no vacuum line required.
Closed-loop, Digital Platen
Temperature Control.
Safe, Simple, Accurate
Operation.
1. UV tape backing remover - ejects UV tape backing (cover
sheet) from system to facilitate waste material management.
sheet) from system to facilitate waste material management.
2. ESD eliminator - ionizer bar eliminates electrostatic charges
on mounting tape to protect ESD-sensitive devices.
on mounting tape to protect ESD-sensitive devices.
3. Non-contact chuck (custom-manufactured, per application) -
reduces mechanical contact between chuck and wafer during
mounting process to protect sensitive wafer lithography
surface.
reduces mechanical contact between chuck and wafer during
mounting process to protect sensitive wafer lithography
surface.
4. Custom-designed chuck work surfaces to accommodate
specific application requirements.
specific application requirements.
OPTIONS
Dimensions: (H x W
x D) 12” x 21” x 37.5”
(30.5 x 53 x 95 cm ).
(30.5 x 53 x 95 cm ).
Weight: 100 lbs (45 kg).
Line Voltage: 110 - 120 Vac, 50/60 Hz, Single Phase,
or
220 - 240 Vac, 50/60 Hz, Single Phase. Air: 5 bar, c.d.a.
220 - 240 Vac, 50/60 Hz, Single Phase. Air: 5 bar, c.d.a.
SPECIFICATIONS
Robust and Easy-to-Use, simple to set up and operate. With its gas spring-aided cover lifting mechanism and ergonomic design, operators find the MWM-853 system easy-to-use throughout the entire shift. Robust mechanical design means reliable wafer mounting, day-in and day-out. Requiring only compressed air and electricity, the MWM-853 can be used almost anywhere space is available.
TECHNOLOGY
